YANG, Hongjing; YANG, Jiao; LI, Guangbo; LI, Xucheng; REN, Dayang. Design and Implementation of a Lithography Chamber Environment Controller Based on Decoupling of Temperature and Humidity. World Scientific Research Journal, [S. l.], v. 11, n. 11, p. 72–81, 2025. DOI: 10.6911/WSRJ.202511_11(11).0009. Disponível em: https://wsr-j.org/index.php/ojs/article/view/56. Acesso em: 13 jul. 2026.