Yang, Hongjing, Jiao Yang, Guangbo Li, Xucheng Li, and Dayang Ren. “Design and Implementation of a Lithography Chamber Environment Controller Based on Decoupling of Temperature and Humidity”. World Scientific Research Journal 11, no. 11 (November 17, 2025): 72–81. Accessed July 13, 2026. https://wsr-j.org/index.php/ojs/article/view/56.